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Testing & Analysis Technique

Micro X-Ray Diffraction (µXRD Analysis)

The Micro X-Ray Diffraction (µXRD) method allows for small volumes of material to be probed. A parallel beam of X-rays are collimated to form a small range (between 300 and 1,000 microns in diameter) before irradiating a sample. The small volume irradiated by the beam affords phase mapping around a perceived defect or point of interest, giving the possibility of a marked preferred orientation of the crystallite or defect irradiated.

Typical Applications

  • Crystalline inclusions within a material
  • Regions of defect within a fabricated sample
  • Reduction spots in ceramics
  • Crystalline defects in glass
  • Filler agglomeration in plastics
  • Reduction spots in electro-ceramics
  • Layers deposited on a substrate.

Typical Industries using XRD

  • Aerospace
  • Automotive
  • Materials
  • Glass, Ceramics and Refractories
  • Healthcare
  • Medical Devices
  • Semiconductors
  • Electronics.



Micro X-Ray Diffraction - At a Glance

  • Information: Chemical composition, crystalline phase, crystallite size and doping content
  • Sample Size: Usually > 100 microns thick with a flat surface area of 20 x 20 mm. Spot size illumination of 300, 500 or 1000 microns
  • Detection Limits: Variable
  • Area Analysed: Dependent upon incident angle and spot size
  • Data Output: Diffraction traces, phase tables and depth profiles


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