Skip to content

White Light Interferometry (WLI)

White Light Interferometry (WLI) Testing Technique

White Light Interferometry (WLI) provides quantitative surface topography information from all solid materials.

The resolution of the measurements are ~0.5µm in the lateral (X, Y) plane and ~1nm in the height (Z) plane.  This allows microfeatures and large scale topographic variations to be monitored in detail.

Surface metrology data is presented in the form of pseudo-color height maps, 3D images, line profiles and surface roughness parameters (e.g. Ra, Rz).

  • Height maps, 3D images and movies to illustrate the surface topography
  • Profilometry - Measurement of feature heights / depths on the nm - mm scale using line profiles
  • Surface roughness parameters -  including Sa - mean surface roughness; Sp - highest peak of the surface; Sv - deepest valley; Sy - total height between highest peak and deepest hole; Sz - mean of distance between the five highest peaks and five deepest holes
  • Measurement of transparent film thickness in the 0.2µm - 50µm range.

Typical applications

  • Characterization of surface defects, stains and residues on metals, glasses and polymers
  • Measurement of coating film thickness and uniformity on arterial stents
  • Monitoring the effect of acid erosion on human tooth enamel
  • Measurement of wear scars in tribological studies.

Typical industries using White Light Interferometry

  • Healthcare
  • Medical Devices
  • Printing
  • Packaging
  • Semiconductors
  • Electronics
  • Aerospace
  • Automotive

WLI - At a Glance

  • Information: Quantitative surface topography and roughness parameters
  • Area Analysed: From ~100mm x 100mm to ~60µm x 80µm
  • Film Thickness: transparent films from ~200nm - ~50µm thick
  • Imaging: Yes
  • Image Resolution: ~0.5µm in X,Y; 1nm in Z
  • Data Output: Height maps, line profiles, 3D images and movies