Scanning Electron Microscopy (SEM) with Energy Dispersive X-Ray Analysis (EDX)

SEM provides detailed high resolution images of the sample by rastering a focussed electron beam across the surface and detecting secondary or backscattered electron signal. An Energy Dispersive X-Ray Analyser (EDX or EDA) is also used to provide elemental identification and quantitative compositional information.

SEM provides images with magnifications up to ~X50,000 allowing sub micron-scale features to be seen i.e. well beyond the range of optical microscopes.

  • Rapid, high resolution imaging with identification of elements present
  • Spatially resolved quantitative EDX (EDA) analysis of user defined areas on sample surface
  • Characterization of particulates and defects
  • Examination of grain structure and segregation effects
  • Coating thickness measurement using cross sectional imaging of polished sections.

Typical Applications

  • Characterization of material structures
  • Assessment of reaction interfaces, service environment and degradation mechanisms
  • Characterization of surface defects, stains and residues on metals, glasses, ceramics and polymers
  • Measurement of the thickness of layered structures, metallised layers, oxide films, composite materials using cross sectional imaging
  • Particulate and contaminant analysis on and within materials.

Typical Industries using SEM/EDX

  • Aerospace
  • Automotive
  • Materials
  • Minerals
  • Glass, Ceramics and Refractories
  • Healthcare
  • Medical Devices
  • Semiconductors
  • Electronics.

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  • White paper

    Problem Solving by Materials Analysis with an Electron Microprobe

    pdf 3 MB

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